ELECTRODE PAIR, METHOD FOR PRODUCING SAME, SUBSTRATE FOR DEVICE, AND DEVICE

Title:

ELECTRODE PAIR, METHOD FOR PRODUCING SAME, SUBSTRATE FOR DEVICE, AND DEVICE

Document Type and Number:

WIPO Patent Application WO/2015/033600

Kind Code:

A1

Abstract:

Provided are an electrode pair which enables the performance of a device to be accurately offered, a method for manufacturing the same, a substrate for a device, and a device. An electrode pair (10), wherein one electrode (10A) and the other electrode (12B) are provided on the same plane so as to face each other with a gap (17) therebetween, and portions facing each other of the one electrode (12A) and the other electrode (12B) are each curved so as to become more distant from the plane as approaching each other. This electrode pair (10) is produced by preparing, as a sample, a substrate on which a pair of seed electrodes are formed with a space therebetween so as to have an initial gap, and, when the sample is immersed in an electroless plating solution, replacing the electroless plating solution after a lapse of a certain period of time, and adjusting the number of times of replacement. As a result, the surfaces facing each other can be vertically adjusted while the gap between the one electrode (12A) and the other electrode (12B) is kept constant.

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Inventors:

MAJIMA YUTAKA (JP)
TERANISHI TOSHIHARU (JP)
TAKESHITA SHUHEI (JP)

Application Number:

PCT/JP2014/056081

Publication Date:

March 12, 2015

Filing Date:

March 09, 2014

Export Citation:

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Assignee:

JAPAN SCIENCE & TECH AGENCY (JP)

International Classes:

H01L29/66; B82B3/00; B82Y30/00; H01L29/06; H01L29/417; H01Q19/06

Domestic Patent References:

WO2012121067A1	2012-09-13
WO2012121067A1	2012-09-13

Foreign References:

JP2008192712A	2008-08-21
JP2012047595A	2012-03-08
JP2011176211A	2011-09-08
JP2005276892A	2005-10-06
JP2013062658A	2013-04-04
JP2011119642A	2011-06-16

Other References:

K. MAEDA; Y. MAJIMA ET AL., ACS NANO
VICTOR M.; SERDIO V.; YASUO AZUMA; SHUHEI TAKESHITA; TARO MURAKI; TOSHIHARU TERANISHI; YUTAKA MAJIMA, NANOSCALE, vol. 4, 2012, pages 7161

Attorney, Agent or Firm:

HIRAYAMA KAZUYUKI (JP)
Kazuyuki Hirayama (JP)

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