Title:
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR DEMAGNETIZING MAGNETIC LENS
Document Type and Number:
WIPO Patent Application WO/2022/269757
Kind Code:
A1
Abstract:
In order to demagnetize a magnetic lens, as an excitation current, an AC decaying current, which vibrates such that the current value alternately becomes a first-polarity current I1(n) and a second-polarity current I2(n) where n is the number of amplitude fluctuations, is applied. The AC decaying current starts the vibration from the first polarity, and the first-polarity current and the second-polarity current are expressed by first-polarity current I1(n) = A･α1(n) and second-polarity current I2(n) = -A･β･α2(n) where A is the amplitude of the first-polarity current, β is a dissymmetry coefficient, α1(n) is the decay function of the first-polarity current, and α2(n) is the decay function of the second-polarity current, the amplitude A of the first-polarity current is less than the saturation current of the magnetic lens, α1(1) = α2(1) = 1 and 0 <β < 1.
Inventors:
HAYASHI SHINGO (JP)
KAZUMI HIDEYUKI (JP)
CHENG ZHAOHUI (JP)
KAZUMI HIDEYUKI (JP)
CHENG ZHAOHUI (JP)
Application Number:
PCT/JP2021/023618
Publication Date:
December 29, 2022
Filing Date:
June 22, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/141; H01F13/00
Foreign References:
| JP2003187732A | 2003-07-04 | |||
| JP2013065484A | 2013-04-11 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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