Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
CHARGED PARTICLE BEAM DEVICE AND SCANNING ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2016/121224
Kind Code:
A1
Abstract:
Provided is a charged particle beam device in which a simple configuration can be employed as a detection unit for detecting signal electrons emitted from a sample. The charged particle beam device is provided with: a charged particle source (11); an acceleration power supply (14) which is connected to the charged particle source (11), and which is provided in order to accelerate a charged particle beam (12) emitted from the charged particle source (11); and an objective lens (26) which focuses the charged particle beam (12) on a sample (23). The objective lens (26) is disposed at the side of the sample (23) opposite to the side on which the charged particle beam (12) is incident. The charged particle beam device is configured from: an upper device which emits the charged particle beam (12) towards the sample (23); a lower device on which the sample (23) is held; and a detector (20) which detects signal electrons (21) emitted from the sample (23) as a result of the charged particle beam (12). The upper device is provided with an aperture (18c). The charged particle beam (12), having passed through the inside of the upper device, is ultimately emitted from the aperture (18c). The detector (20) is provided in a space which does not include the upper device and the lower device.

More Like This:
JP4485158Observation method of semiconductor devices with an electron microscope and the devices
JP4418789How to localize fluorescent markers
JP2001052642SCANNING ELECTRON MICROSCOPE AND MICRO-PATTERN MEASURING METHOD
Inventors:
KUMAMOTO KAZUYA (JP)
MATSUDA SADAYOSHI (JP)
Application Number:
PCT/JP2015/084072
Publication Date:
August 04, 2016
Filing Date:
December 03, 2015
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MATSUSADA PREC INC (JP)
International Classes:
H01J37/28; H01J37/06; H01J37/244
Foreign References:
JPH10223169A1998-08-21
JP2006313651A2006-11-16
JP2008004329A2008-01-10
JP2005005178A2005-01-06
Attorney, Agent or Firm:
TSUBAKI, Yutaka (JP)
Camellia 豊 (JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: EXCESS GAS BURNING DEVICE

Next Patent: CHARGED PARTICLE BEAM DEVICE AND SCANNING ELECTRON MICROSCOPE