Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/085049
Kind Code:
A1
Abstract:
A charged particle beam device 1 comprises: a plurality of detectors 7 that detect signal particles 9 released by a sample 8 as a result of irradiation by a charged particle beam 3, and convert the particles into an output electrical signal 17; an energy discriminator 14, provided for each detector 7, that discriminates the output electrical signal 17 according to the energy of the signal particles 9; a discrimination control block 21 that sets energy discrimination conditions for each energy discriminator 14; and an image computation block 22 that generates an image on the basis of the discriminated electrical signal. The discrimination control block 21 sets energy discrimination conditions that differ among the plurality of energy discriminators 14.
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Inventors:
NISHIHATA TAKAHIRO (JP)
OSAKI MAYUKA (JP)
TAKAGI YUJI (JP)
YAMAMOTO TAKUMA (JP)
SUZUKI MAKOTO (JP)
OSAKI MAYUKA (JP)
TAKAGI YUJI (JP)
YAMAMOTO TAKUMA (JP)
SUZUKI MAKOTO (JP)
Application Number:
PCT/JP2020/037812
Publication Date:
May 06, 2021
Filing Date:
October 06, 2020
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/05; H01J37/244; H01J37/28; H01L21/66
Domestic Patent References:
| WO2011092757A1 | 2011-08-04 | |||
| WO2018173242A1 | 2018-09-27 | |||
| WO2011089955A1 | 2011-07-28 |
Foreign References:
| JP2014203603A | 2014-10-27 | |||
| JP2010092859A | 2010-04-22 |
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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