Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/053237
Kind Code:
A1
Abstract:
In order to provide a charged particle beam device capable of quickly obtaining multiple charged particle beam images captured under different detection conditions in the same field of view, this charged particle beam device comprises a charged particle source for generating a charged particle beam, a scanning unit for scanning a sample while deflecting the charged particle beam, a detector for detecting secondary particles emitted from the sample and outputting detection signals, and a control unit for generating an observation image of the sample on the basis of the detection signals, and is characterized in that the control unit generates a mixed-condition image, that is, a single image in which detection signals obtained under different detection conditions coexist, by changing the detection condition of the detector for each pixel while the sample is being scanned, and restores single-condition images, that is, images obtained under the respective detection conditions, by using the mixed-condition image.
Inventors:
IMAI YUTA (JP)
KOHASHI TERUO (JP)
KATANE JUNICHI (JP)
KOHASHI TERUO (JP)
KATANE JUNICHI (JP)
Application Number:
PCT/JP2021/035740
Publication Date:
April 06, 2023
Filing Date:
September 29, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/22
Domestic Patent References:
| WO2010026833A1 | 2010-03-11 |
Foreign References:
| JP2008177064A | 2008-07-31 | |||
| JP2010062106A | 2010-03-18 | |||
| JP2014075365A | 2014-04-24 | |||
| US20170213355A1 | 2017-07-27 | |||
| US20150069233A1 | 2015-03-12 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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