Title:
CHARGED PARTICLE GUN AND CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/117226
Kind Code:
A1
Abstract:
The present disclosure provides a charged particle beam device capable of simultaneously achieving protection of a charged particle source against electrical discharging inside a charged particle gun and highly accurate control of the charged particle gun, for both DC and AC components. A charged particle gun according to the present disclosure is configured such that an extraction voltage and an acceleration voltage are superposed and supplied to a charged particle beam source, a wiring between the charged particle beam source and a voltage circuit is covered with first and second enclosures, the first enclosure is configured to be connected to the extraction electrode, and the second enclosure is configured to be connected to an acceleration electrode and to a reference potential of the voltage circuit.
Inventors:
SASAKI TOMOYO (JP)
Application Number:
PCT/JP2019/048961
Publication Date:
June 17, 2021
Filing Date:
December 13, 2019
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/06; H01J1/15; H01J37/08
Foreign References:
| JPH01227340A | 1989-09-11 | |||
| JPS53115499A | 1978-10-07 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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