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Title:
CHEMICAL LIQUID SUPPLY MECHANISM AND SMALL-SIZED MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/080081
Kind Code:
A1
Abstract:
[Problem] To provide a chemical liquid supply mechanism which can accurately control the amount of supply of chemical liquid even if the amount of supply is small and which is small-sized and low cost. [Solution] A chemical liquid supply mechanism is provided with a syringe having: a cylindrical syringe body for receiving a chemical liquid; a plunger insertion opening provided at one end of the syringe body; and a nozzle provided at the other end of the syringe body. A plunger is fitted into the syringe body from the plunger insertion opening. A plunger movement mechanism moves the plunger in the direction toward the nozzle by a predetermined distance to cause a predetermined amount of the chemical liquid to be discharged from the nozzle.

Inventors:
SENSU YOSHIHISA (JP)
HARA SHIRO (JP)
KHUMPUANG SOMMAWAN (JP)
TAKEUCHI SHO (JP)
DOI MIKIO (JP)
ARASAKI SHIGEO (JP)
SUGIYAMA YUKIHIRO (JP)
HATTORI KOICHI (JP)
Application Number:
PCT/JP2014/081051
Publication Date:
June 04, 2015
Filing Date:
November 25, 2014
Export Citation:
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Assignee:
LITHO TECH JAPAN CORP (JP)
NAT INST OF ADVANCED IND SCIEN (JP)
PULSA CO LTD (JP)
International Classes:
H01L21/027; B05C5/00; B05C9/14; B05C11/10
Domestic Patent References:
WO2013008799A12013-01-17
Foreign References:
JPH10314640A1998-12-02
JP2006064545A2006-03-09
JP2013539202A2013-10-17
JP2012033886A2012-02-16
JP2007258462A2007-10-04
JP2005296771A2005-10-27
JP2012235132A2012-11-29
JP2009212404A2009-09-17
JP2009136799A2009-06-25
JPH09270373A1997-10-14
Attorney, Agent or Firm:
SANO, Hiroshi et al. (JP)
Sano 弘 (JP)
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