Title:
CHEMICALLY AMPLIFIED POSITIVE PHOTOSENSITIVE COMPOSITION FOR HIGHLY SENSITIVE ORGANIC DIELECTRIC LAYER, WITH EXCELLENT HEAT RESISTANCE, AND METHOD FOR FORMING ORGANIC DIELECTRIC LAYER USING SAME
Document Type and Number:
WIPO Patent Application WO/2013/129864
Kind Code:
A1
Abstract:
The present invention relates to a chemically amplified positive photosensitive composition for a highly sensitive organic dielectric layer, with excellent heat resistance, and a method for forming an organic dielectric layer using the same. The chemically amplified positive photosensitive composition for an organic dielectric layer contains a binder resin, wherein the binder resin comprises a monomer having an active energy ray or heat cross-linking group and containing an acid-labile protecting group, or a monomer having an active energy ray or heat cross-linking group but containing no acid-labile protecting groups, wherein the binder resin comprises at least one type of the monomers or each of the monomers. According to the present invention, a monomer containing an acid-labile protecting group, or an active energy ray or heat cross-linking group other than an acid-labile protecting group in a molecular structure is formed in the form of a polymer, a copolymer or a mixture thereof, which is conventionally different, and thus it is possible to maintain excellent sensitivity and resolution, to remarkably reduce the generation of volatile vapors during exposure, and to maintain the shape of a pattern within a desired range of slope (tapered angle) by inhibiting the distortion of the pattern due to heat shrinkage or thermal flow of a film in a thermal process after forming the pattern.
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Inventors:
LEE YUN HYEONG (KR)
Application Number:
PCT/KR2013/001634
Publication Date:
September 06, 2013
Filing Date:
February 28, 2013
Export Citation:
Assignee:
LEE YUN HYEONG (KR)
International Classes:
G03F7/039; G03F7/004; G03F7/09; G03F7/26
Foreign References:
| KR20110085924A | 2011-07-27 | |||
| JP2003064134A | 2003-03-05 | |||
| KR20110095168A | 2011-08-24 | |||
| KR20110135752A | 2011-12-19 | |||
| KR20120106086A | 2012-09-26 |
Attorney, Agent or Firm:
CHO, YOUNG HYUN (KR)
์กฐ์ํ (KR)
์กฐ์ํ (KR)
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Claims: