Title:
CHIP-SCALE DISC-TYPE ACOUSTO-OPTIC STANDING-WAVE GYROSCOPE
Document Type and Number:
WIPO Patent Application WO/2022/252459
Kind Code:
A1
Abstract:
A chip-scale disc-type acousto-optic standing-wave gyroscope, comprising a substrate and a gyroscope structure placed on an upper surface of the substate; the substrate is disc-shaped; the gyroscope structure comprises an acoustic wave driving module and an optical detection module; the acoustic wave driving module is arranged to be circular outwards in a radial direction using a center of circle of the disc as the origin; the optical detection module is provided in the middle of the acoustic wave driving module and is in the shape of a circular ring; the acoustic wave driving module comprises an annular interdigital transducer, a metal electrode layer group uniformly sputtered on the annular interdigital transducer, an annular metal lattice (3), and an annular reflecting grating (4) which are sequentially arranged from the center of circle of the disc to the periphery in the radial direction; the optical detection module comprises a first grating coupler (5-1), a light source input end optical waveguide (6), a first coupler (8-1), a second coupler (8-2), a signal output end optical waveguide (7), and a second grating coupler (5-2) that are sequentially connected. The chip-scale disc-type acousto-optic standing-wave gyroscope can improve the sensitivity of gyroscope detection.
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Inventors:
CHANG HONGLONG (CN)
TIAN LU (CN)
SHEN QIANG (CN)
YANG GE (CN)
TIAN LU (CN)
SHEN QIANG (CN)
YANG GE (CN)
Application Number:
PCT/CN2021/122064
Publication Date:
December 08, 2022
Filing Date:
September 30, 2021
Export Citation:
Assignee:
UNIV NORTHWESTERN POLYTECHNICAL (CN)
International Classes:
G01C19/5656
Foreign References:
| CN113340289A | 2021-09-03 | |||
| CN112066967A | 2020-12-11 | |||
| CN109781087A | 2019-05-21 | |||
| CN109307507A | 2019-02-05 | |||
| CN109307506A | 2019-02-05 | |||
| US20150260521A1 | 2015-09-17 |
Attorney, Agent or Firm:
ZYX INTELLECTUAL PROPERTY LAW FIRM (CN)
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