Title:
CHUCK GRASPING ACCURACY CONFIRMATION METHOD, CHUCK CLAW REPLACING METHOD, AND CHUCK GRASPING ACCURACY CONFIRMATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/032237
Kind Code:
A1
Abstract:
This chuck grasping accuracy confirmation method includes: a grasping step for grasping an object to be measured with claws; a moving step; and a measurement step. In the moving step, a mobile-body driving unit is driven to move a mobile body which is provided with a measuring instrument capable of measuring oscillation of the object to be measured, to a position where the measuring instrument can measure oscillation of the object to be measured. In the measurement step, a rotary driving unit is driven to cause the measuring instrument to measure oscillation of the object to be measured, while rotating a chuck.
Inventors:
NAGAOSA HIROSHI (JP)
Application Number:
PCT/JP2019/031573
Publication Date:
February 13, 2020
Filing Date:
August 09, 2019
Export Citation:
Assignee:
HOWA MACHINERY LTD (JP)
International Classes:
B23B31/00; B23Q3/06; B23Q17/00
Foreign References:
| JPH08155773A | 1996-06-18 | |||
| JPS5894901A | 1983-06-06 | |||
| JPS63272408A | 1988-11-09 | |||
| JPS59102591A | 1984-06-13 | |||
| JPH02109616A | 1990-04-23 | |||
| JP3185816B2 | 2001-07-11 |
Other References:
See also references of EP 3834971A4
Attorney, Agent or Firm:
NAGAI Hiroshi et al. (JP)
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