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Title:
CLEANING BASKET
Document Type and Number:
WIPO Patent Application WO/2023/013379
Kind Code:
A1
Abstract:
The present invention prevents contamination of polycrystalline silicon at a cleaning step. A cleaning basket (1) is used in the cleaning of polycrystalline silicon with the polycrystalline silicon accommodated therein. The cleaning basket (1) comprises a plurality of structural components (10) formed from resin, and the plurality of structural components (10) are joined to one another by threaded engagement of screws (N) formed from resin.

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JP2021184463METHOD FOR DETERMINING CLEANLINESS OF CLEANING MEMBER, METHOD FOR DETERMINING ADSORPTION CHARACTERISTICS OF CONTAMINANT CONTAMINATING CLEANING MEMBER, METHOD FOR DETERMINING CLEANLINESS OF SUBSTRATE, PROGRAM FOR DETERMINING CLEANLINESS OF SUBSTRATE, AND PROGRAM FOR DETERMINING END POINT OF CLEANING PROCESS
Inventors:
ICHITSUBO KOKI (JP)
Application Number:
PCT/JP2022/027648
Publication Date:
February 09, 2023
Filing Date:
July 14, 2022
Export Citation:
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Assignee:
TOKUYAMA CORP (JP)
International Classes:
B08B3/04; B08B13/00; C01B33/02
Foreign References:
JP2017095289A2017-06-01
CN204651297U2015-09-16
JP2006023201A2006-01-26
JP2007022547A2007-02-01
JP2005172512A2005-06-30
JP2011068554A2011-04-07
JP2020128332A2020-08-27
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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