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Title:
CLEANING MEMBER
Document Type and Number:
WIPO Patent Application WO/2016/031618
Kind Code:
A1
Abstract:
Provided is a cleaning member which is capable of sufficiently increasing the degree of cleanliness inside a vacuum-system device. This cleaning member is for removing contamination in a vacuum-system device, and includes a fibrous columnar structure. The fibrous columnar structure is provided with a plurality of fibrous columnar objects. The cleaning member has a shear adhesive strength with respect to a glass surface at room temperature of at least 10 N/cm2.

Inventors:
MAENO YOUHEI (JP)
YUMINE TAKUYA (JP)
Application Number:
PCT/JP2015/073086
Publication Date:
March 03, 2016
Filing Date:
August 18, 2015
Export Citation:
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Assignee:
NITTO DENKO CORP (JP)
International Classes:
B01J3/00; B01J20/20; B01J20/28; B08B15/00; C01B31/02
Foreign References:
JP2008047601A2008-02-28
JP2011112532A2011-06-09
JP2013221915A2013-10-28
JP2006055698A2006-03-02
JP2014200769A2014-10-27
Attorney, Agent or Firm:
MOMII, Takafumi (JP)
Takafumi Momii (JP)
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