Title:
CLEANING TABLE FOR ELECTRONIC DEVICE LAMINATED BODY, CLEANING DEVICE, AND CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/137588
Kind Code:
A1
Abstract:
Provided is a cleaning table for an electronic device laminated body for cleaning a transparent base material without wetting an electronic device side. A cleaning table 10 according to the present invention is configured to clean a transparent base material 52 of an electronic device laminated body 50, wherein the cleaning table comprises a placement surface 11 on which the electronic device laminated body is placed with the transparent base material as a front surface, and has a groove 20 formed on the placement surface and formed at a position facing a back-side outer peripheral part 54 of an outer peripheral edge side 53 of the electronic device laminated body, an outer peripheral wall 22 constituting an outer periphery of the groove and extending to the outer peripheral edge side of the electronic device laminated body, and a gas supply means 24 that communicates with the groove and supplies purge gas to the groove. The outer peripheral wall is separated by a gap 23 from the back-side outer peripheral part of the electronic device laminated body. The purge gas supplied by the gas supply means to the groove is blown out from the gap between the outer peripheral edge side of the electronic device laminated body and the outer peripheral wall.
Inventors:
OE TOMOHISA
HABUCHI KOZO
TERANO SHO
OKAMOTO KENTA
HABUCHI KOZO
TERANO SHO
OKAMOTO KENTA
Application Number:
PCT/JP2021/017004
Publication Date:
June 30, 2022
Filing Date:
April 28, 2021
Export Citation:
Assignee:
YODOGAWA MEDEC CO LTD (JP)
International Classes:
B08B1/04; B08B3/02; B08B5/02; H01L21/304; H01L21/683
Foreign References:
| JP2001244169A | 2001-09-07 | |||
| JPH09139375A | 1997-05-27 | |||
| JPH06132210A | 1994-05-13 | |||
| JP2013071022A | 2013-04-22 |
Attorney, Agent or Firm:
MARUYAMA & CO. (JP)
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