Title:
CO-CR-PT-B FERROMAGNETIC BODY SPUTTERING TARGET
Document Type and Number:
WIPO Patent Application WO/2023/153264
Kind Code:
A1
Abstract:
This Co-Cr-Pt-B ferromagnetic body sputtering target is characterized by comprising: a Co-Cr-Pt-B alloy phase (A) that includes B in the amount of more than 0 at% but not more than 30 at%, where B aggregate phase is not eccentrically located and B is distributed throughout; and an alloy phase (B) which is a Co-B alloy, a Co-Cr-B alloy, or a Co-Pt-B alloy, and which includes B in the amount of more than 0 at% but not more than 20 at%, where B aggregate phase is not eccentrically located and B is distributed throughout. The alloy phase (A) accounts for 50 vol% or more of the sputtering target, and the alloy phase (B) accounts for less than 50 vol% of the sputtering target.
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Inventors:
KAMADA TOMONARI (JP)
Application Number:
PCT/JP2023/002957
Publication Date:
August 17, 2023
Filing Date:
January 31, 2023
Export Citation:
Assignee:
TANAKA PRECIOUS METAL IND (JP)
International Classes:
C23C14/34; B22F1/00; B22F3/14; B22F9/08; C22C1/04; C22C5/04; C22C19/07; C22C30/00; H01F1/047; H01F41/18
Foreign References:
| JP2002226970A | 2002-08-14 | |||
| JP2001107226A | 2001-04-17 | |||
| JP2009001861A | 2009-01-08 | |||
| JP2007031827A | 2007-02-08 |
Attorney, Agent or Firm:
YAMAMOTO, Osamu et al. (JP)
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