Title:
COATING COMPOSITION, AND METHOD FOR PRODUCING PHOTORESIST LAMINATE
Document Type and Number:
WIPO Patent Application WO/2015/080061
Kind Code:
A1
Abstract:
The present invention provides a coating composition which exhibits excellent followability with regard to steps when coated, and with which it is possible to form a film exhibiting excellent solubility with regard to an alkali aqueous solution and having a low refractive index in a short-wavelength region. A coating composition containing a solvent and a fluoride-containing polymer (A), which has a unit represented by -[CX1X2-CY(-Rf-COOM)]- and a number average molecular weight between 1000 and 7500. X1 and X2 each independently represent a hydrogen atom, a fluorine atom, or a chlorine atom; Y represents a hydrogen atom, a fluorine atom, a chlorine atom, a methyl group, or a trifluoromethyl group; Rf represents a branched perfluoroalkylene group which may contain an ethereal oxygen atom between carbon-carbon atoms, or a branched oxyperfluoroalkylene group which may contain an ethereal oxygen atom between carbon-carbon atoms; and M represents a hydrogen atom or an ammonium ion which may be substituted.
Inventors:
YAMASAKI RYUJIRO (JP)
ASAKAWA AKIHIKO (JP)
SAKANE YOSHIHIKO (JP)
SATO MASAKUNI (JP)
UMEMURA KAZUO (JP)
ASAKAWA AKIHIKO (JP)
SAKANE YOSHIHIKO (JP)
SATO MASAKUNI (JP)
UMEMURA KAZUO (JP)
Application Number:
PCT/JP2014/080972
Publication Date:
June 04, 2015
Filing Date:
November 21, 2014
Export Citation:
Assignee:
ASAHI GLASS CO LTD (JP)
International Classes:
B05D7/24; C09D127/12; B32B27/30; C08F16/26; G03F7/11
Domestic Patent References:
| WO2004067655A1 | 2004-08-12 | |||
| WO2008102820A1 | 2008-08-28 | |||
| WO2005050320A1 | 2005-06-02 |
Foreign References:
| JPH11124531A | 1999-05-11 | |||
| JP2011215546A | 2011-10-27 | |||
| JP2005336484A | 2005-12-08 | |||
| JP2006047351A | 2006-02-16 |
Attorney, Agent or Firm:
SENMYO, Kenji et al. (JP)
Spring name Kenji (JP)
Spring name Kenji (JP)
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