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Title:
COATING DEVICE AND COATING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/188207
Kind Code:
A1
Abstract:
This coating device 10 discharges a coating material from a discharge port provided to a coating head 20 onto substrates 36 placed on a table 35, and forms a thin film on each substrate 36 while moving at least one among the coating head 20 and the table 35. The coating device 10 comprises: a first liquid delivering pump 13a that supplies the coating material to the coating head 20 by way of first piping 14a; and a second liquid delivering pump 13b that is capable of supplying the coating material to the coating head 20 and evacuating the coating material from the coating head 20 by way of second piping 14b independent from the first piping 14a. The second liquid delivering pump 13b supplies the coating material to the coating head 20 when the coating material is supplied to the coating head 20 by the first liquid delivering pump 13a, and evacuates the coating material from the coating head 20 at least after the stopping of the first liquid delivering pump 13a.

Inventors:
WATANABE MICHIHIRO (JP)
SAITO TADAYUKI (JP)
Application Number:
PCT/JP2022/016347
Publication Date:
October 05, 2023
Filing Date:
March 30, 2022
Export Citation:
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Assignee:
SAT CO LTD (JP)
International Classes:
B05C11/10; B05C5/02
Foreign References:
JP2020089809A2020-06-11
JP2014187260A2014-10-02
JP2011014732A2011-01-20
JP2015020161A2015-02-02
JP2012000588A2012-01-05
JP2004313859A2004-11-11
JP2015054311A2015-03-23
JP2021520991A2021-08-26
Attorney, Agent or Firm:
KIMURA Mitsuru (JP)
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