Title:
COATING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/221572
Kind Code:
A1
Abstract:
The present invention relates to a coating system, comprising a vacuum chamber and a rotary tool disposed in the vacuum chamber. The rotary tool comprises a rotatably mounted rotary component, a first driving module, a second driving module, and a plurality of coating rotary tables; the coating rotary tables are respectively rotatably connected to a rotary support, and the coating rotary tables respectively match with the rotary component and are transmittingly connected to the rotary component; the rotary support is rotatably connected to a rack; the first driving module is transmittingly connected to the rotary support and is configured to drive the coating rotary tables to synchronously revolve around a rotary center of the rotary component respectively and synchronously drive the self-rotation of the coating rotary tables; and the second driving module is transmittingly connected to the rotary component and is configured to drive the self-rotation of the coating rotary tables. The coating system has a plurality of working modes, and the self-rotation of the coating rotary tables at specific positions can be implemented, thereby significantly improving the coating efficiency of elements, realizing coating in batches, and implementing coating of different film layers for different coating elements.
Inventors:
YANG WEI (CN)
LIU CANGLANG (CN)
WAN MIN (CN)
LUO YAO (CN)
LI YUE (CN)
LIU CANGLANG (CN)
WAN MIN (CN)
LUO YAO (CN)
LI YUE (CN)
Application Number:
PCT/CN2023/075391
Publication Date:
November 23, 2023
Filing Date:
February 10, 2023
Export Citation:
Assignee:
CHENGDU ZHONGKE ZHUOER INTELLIGENT TECH GROUP CO LTD (CN)
International Classes:
C23C14/50; C23C14/35; C23C14/54
Foreign References:
| CN115161611A | 2022-10-11 | |||
| CN217265994U | 2022-08-23 | |||
| CN217265993U | 2022-08-23 | |||
| CN111809160A | 2020-10-23 | |||
| CN212388106U | 2021-01-22 | |||
| CN214032679U | 2021-08-24 | |||
| JPH05314540A | 1993-11-26 |
Attorney, Agent or Firm:
BEIJING LINGZHUAN IP AGENCY CO., LTD. (CN)
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