Title:
COATING TREATMENT METHOD, STORAGE MEDIUM, AND COATING TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/189753
Kind Code:
A1
Abstract:
This coating treatment method includes: acquiring, individually, surface images of a plurality of substrates each having on a surface thereof mutually different films formed by feeding a treatment liquid having mutually different discharge quantities; obtaining a plurality of polar coordinate transformed images by subjecting the surface images of each of the plurality of substrates to polar coordinate transformation; displaying one or more of the polar coordinate transformed images included in the plurality of polar coordinate transformed images on a screen in a state corresponding to information specifying the discharge quantity of the treatment liquid on the substrate imaged in the image; and determining the discharge quantity of the treated liquid on the substrate when the film of the treatment liquid forms, on the basis of an instruction by a user with respect to the display content on the screen.
Inventors:
TSURUDA TOYOHISA (JP)
SHIBA KAZUHIRO (JP)
NAKAMURA NAOTO (JP)
SHIBA KAZUHIRO (JP)
NAKAMURA NAOTO (JP)
Application Number:
PCT/JP2023/010675
Publication Date:
October 05, 2023
Filing Date:
March 17, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B05C11/08; B05C11/10; H01L21/027
Foreign References:
| JP2017044494A | 2017-03-02 | |||
| JP2010010314A | 2010-01-14 | |||
| JP2007286000A | 2007-11-01 | |||
| JP2006049630A | 2006-02-16 | |||
| JP2001202518A | 2001-07-27 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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