Title:
COLLET DETECTION DEVICE, COLLET ADJUSTMENT DEVICE, BONDING DEVICE, COLLET DETECTION METHOD, AND COLLET ADJUSTMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2022/054393
Kind Code:
A1
Abstract:
A collet detection device 30 that detects the position or state of a collet 22 that sucks and picks up chips 21. The collet detection device 30 comprises a light-reflective detection mechanism 31 and an arm 32 and is characterized by the detection mechanism 31 performing three-dimensional detection by the arm 32 moving either the detection mechanism 31 or the collet 22, relative to the other, in a direction orthogonal to the contact/separation direction for the detection mechanism 31 and the collet 22.
Inventors:
NAGAMOTO NOBUHIRO (JP)
Application Number:
PCT/JP2021/026268
Publication Date:
March 17, 2022
Filing Date:
July 13, 2021
Export Citation:
Assignee:
CANON MACHINERY INC (JP)
International Classes:
H01L21/52
Foreign References:
| JPH09219425A | 1997-08-19 | |||
| JPH07120229A | 1995-05-12 | |||
| JPH11238568A | 1999-08-31 | |||
| JP2004266191A | 2004-09-24 | |||
| JP2019075446A | 2019-05-16 | |||
| JPH09223713A | 1997-08-26 | |||
| JPH04260344A | 1992-09-16 | |||
| JP2000260789A | 2000-09-22 |
Attorney, Agent or Firm:
SHIROMURA Kunihiko et al. (JP)
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