Title:
COMPOSITE SUBSTRATE, LAMINATE, METHOD FOR PRODUCING COMPOSITE SUBSTRATE, AND METHOD FOR PRODUCING LAMINATE
Document Type and Number:
WIPO Patent Application WO/2023/176648
Kind Code:
A1
Abstract:
A composite substrate according to the present invention is for production of a graphene film, and comprises, in the following order, a substrate which has a thermal expansion coefficient of not more than 2.0×10-6(K-1), an oxide film, and a metal film containing Cu or Ni, wherein, in a chart obtained by XRD measurement of the metal film with a θ-2θ method, a prescribed diffraction peak is observed and a diffraction peak other than the prescribed diffraction peak is unobserved, or the intensity of the diffraction peak other than the prescribed diffraction peak is not more than 1/10 of the intensity of the prescribed diffraction peak.
Inventors:
WATANABE HIROSHI (JP)
YASUI YOJI (JP)
YASUI YOJI (JP)
Application Number:
PCT/JP2023/008935
Publication Date:
September 21, 2023
Filing Date:
March 08, 2023
Export Citation:
Assignee:
AGC INC (JP)
International Classes:
C01B32/186; B32B7/02; B32B9/00; B32B15/04; B32B15/08; C23C16/26
Domestic Patent References:
| WO2016104291A1 | 2016-06-30 | |||
| WO2017170579A1 | 2017-10-05 |
Foreign References:
| JP2017043538A | 2017-03-02 | |||
| JPH08260150A | 1996-10-08 | |||
| JP2016518300A | 2016-06-23 | |||
| US20100021708A1 | 2010-01-28 |
Attorney, Agent or Firm:
EIKOH, P.C. (JP)
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