Title:
CONCENTRIC STAIRCASE STRUCTURE IN THREE-DIMENSIONAL MEMORY DEVICE AND METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2022/087943
Kind Code:
A1
Abstract:
Embodiments of 3D memory devices having a concentric staircase structure and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory array structure and a concentric staircase structure in an intermediate of the memory array structure. The concentric staircase structure includes a plurality of concentric zones in a radial direction in a plan view. Each of the plurality of concentric zones includes a plurality of stairs in a tangential direction in the plan view.
Inventors:
ZHANG KUN (CN)
KONG CUICUI (CN)
ZHANG ZHONG (CN)
ZHOU WENXI (CN)
KONG CUICUI (CN)
ZHANG ZHONG (CN)
ZHOU WENXI (CN)
Application Number:
PCT/CN2020/124671
Publication Date:
May 05, 2022
Filing Date:
October 29, 2020
Export Citation:
Assignee:
YANGTZE MEMORY TECH CO LTD (CN)
International Classes:
H01L27/11519; H01L27/11551; H01L27/11565; H01L27/11578
Foreign References:
| US20190393240A1 | 2019-12-26 | |||
| US20180211968A1 | 2018-07-26 | |||
| US20190043880A1 | 2019-02-07 | |||
| US20160351672A1 | 2016-12-01 | |||
| CN109690776A | 2019-04-26 |
Attorney, Agent or Firm:
NTD UNIVATION INTELLECTUAL PROPERTY AGENCY LTD. (CN)
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