Title:
CONDUCTANCE-ADJUSTABLE VACUUM VALVE
Document Type and Number:
WIPO Patent Application WO/2023/018253
Kind Code:
A1
Abstract:
The present invention relates to a conductance-adjustable vacuum valve comprising: a valve body (110) having a chamber connector (111) formed on the lower portion thereof and connected to a vacuum chamber, and having a pump connector (113) formed on a side surface thereof and connected to the vacuum pump; a lower driving chamber (120) coupled to the upper portion of the valve body (110), a lower air injection opening (121) being formed in the front lower portion of the lower driving chamber (120); an opening/closing piston portion (130) including an upper piston (133) formed horizontally in the lower driving chamber (120), a lower piston (131) formed in the valve body (110) and sized to be able to block the chamber connector (111), and a connecting shaft (132) for connecting the upper piston (133) and the lower piston (131) and transferring an upward movement of the upper piston (133) to the lower piston (131) according to whether or not air is supplied through the lower air injection opening (121) such that the lower piston (131) moves between a closed position in which the chamber connector (111) is closed and an open position in which the chamber connector (111) is opened; an upper driving chamber (150) provided above the lower driving chamber (120), an upper air injection opening (157) being formed in the upper front surface of the upper driving chamber (150); an adjustment piston (160) contained in the upper driving chamber (150) such that an upper pressurizing shaft (161) is formed to extend toward the lower driving chamber (120), the adjustment piston (160) moving upwards/downwards inside the upper driving chamber (150) according to whether or not air is injected through the upper air injection opening (157); a conductance adjustment portion (140) provided between the upper driving chamber (150) and the lower driving chamber (120) so as to guide the upper pressurizing shaft (161) to the lower driving chamber (120) such that, when air is injected simultaneously through the lower air injection opening (121) and the upper air injection opening (157), the upper pressurizing shaft (161) moves downwards together with the adjustment piston (160) and pressurizes the ascending upper piston (133), thereby opening the chamber connector (111) to an intermediate open position; and an upper cap (170) coupled to the upper portion of the upper driving chamber (150).
Inventors:
AHN HEE JUN (KR)
Application Number:
PCT/KR2022/012027
Publication Date:
February 16, 2023
Filing Date:
August 11, 2022
Export Citation:
Assignee:
AHN HEE JUN (KR)
International Classes:
F16K51/02; F16K27/02; F16K31/122; F16K31/50; F16K31/528; F16K37/00
Foreign References:
| JP2015034621A | 2015-02-19 | |||
| KR20200032192A | 2020-03-25 | |||
| KR20050121704A | 2005-12-27 | |||
| KR20170085407A | 2017-07-24 | |||
| US20140131607A1 | 2014-05-15 |
Attorney, Agent or Firm:
TAEDONG PATENT & LAW FIRM (KR)
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