Title:
CONTACT TERMINAL, INSPECTION TOOL, AND INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/145073
Kind Code:
A1
Abstract:
A probe Pr comprising: a conductive cylindrical body Pa having a cylindrical shape; and a conductive first central conductor Pc having a rod shape. The cylindrical body Pa has a cross section perpendicular to the axial direction that has a rectangular or hexagonal shape. The first central conductor Pc has a cross section perpendicular to the axial direction of the first central conductor Pc that has the same shape as the cross section of the cylindrical body Pa. The first central conductor Pc includes: a first insertion section inserted in one end side of the cylindrical body Pa; and a first protruding section Pc4 that protrudes from one end of the cylindrical body Pa.
Inventors:
OTA NORIHIRO (JP)
KAIDA MICHIO (JP)
KAIDA MICHIO (JP)
Application Number:
PCT/JP2019/049797
Publication Date:
July 16, 2020
Filing Date:
December 19, 2019
Export Citation:
Assignee:
NIDEC READ CORP (JP)
International Classes:
G01R1/067; G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
| WO2017208690A1 | 2017-12-07 |
Foreign References:
| JP2018197714A | 2018-12-13 | |||
| JP2000346872A | 2000-12-15 | |||
| JP2007024664A | 2007-02-01 | |||
| JP2015158491A | 2015-09-03 | |||
| JP2002323515A | 2002-11-08 | |||
| JP2012145593A | 2012-08-02 | |||
| JP2017162600A | 2017-09-14 |
Attorney, Agent or Firm:
YANAGINO Takao et al. (JP)
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