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Title:
CONTINUOUS WAFER POLISHING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2024/002224
Kind Code:
A1
Abstract:
A continuous wafer polishing system, comprising a support (1); polishing units, comprising polishing tables (22) and polishing arms (21); a transmission channel (3), arranged in parallel to the support (1); wafer carrier devices (5), comprising wafer carrier tables (51), lifting/lowering driving mechanisms (52), and transverse driving mechanisms (7), the lifting/lowering driving mechanisms (52) being connected to the lower portions of the wafer carrier tables (51), and each transverse driving mechanism (7) being located on a first side of each wafer carrier table (51); and support guide rails (6) each provided on the second side of the wafer carrier table (51) that is arranged opposite to the first side. Under the combined action of the transverse driving mechanisms (7) and the support guide rails (6), the wafer carrier tables (51) translate along the support (1) so as to receive wafers conveyed from the polishing tables (22) by different polishing arms (21) or provide the wafers to different polishing arms (21) so as to be transmitted to different polishing tables (22). The wafer carrier devices (5) can move in the transmission channel (3), so that the polishing process can be continuously performed, the polishing efficiency is improved, and the transmission structure is simplified; the transverse driving mechanism (7) are located on the first side of the wafer carrier table (51), so that the layout design is reasonable; and the transverse driving mechanisms (7) cooperate with the support guide rails (6), so that the transmission structure is more stable.

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Inventors:
XU XIAOYU (CN)
ZHENG DONGZHOU (CN)
Application Number:
PCT/CN2023/103745
Publication Date:
January 04, 2024
Filing Date:
June 29, 2023
Export Citation:
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Assignee:
HANGZHOU SIZONE ELECTRONIC TECH INC (CN)
International Classes:
H01L21/677; B24B29/00; H01L21/304; H01L21/67
Foreign References:
CN115338705A2022-11-15
CN217800946U2022-11-15
JPH11274262A1999-10-08
JPH1064975A1998-03-06
CN109304670A2019-02-05
CN110289238A2019-09-27
CN113910099A2022-01-11
CN114619308A2022-06-14
CN211879336U2020-11-06
JP2012084825A2012-04-26
KR102349650B12022-01-13
KR20160055477A2016-05-18
KR20160122953A2016-10-25
US20110269378A12011-11-03
US20210205952A12021-07-08
US6364593B12002-04-02
Attorney, Agent or Firm:
HANGZHOU KAIZHI PATENT AGENCY (GENERAL PARTNERSHIP) (CN)
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