Title:
CONTROL METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS PRODUCTION LINE, DEVICE, AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2023/010757
Kind Code:
A1
Abstract:
The present disclosure provides a control method and apparatus for a semiconductor process production line, a device, and a storage medium. The control method for a semiconductor process production line is applied to a control device for a semiconductor process production line, and comprises: receiving parameter information of a process station to be deleted; obtaining, according to the parameter information, an associated process station having an association relationship with the process station to be deleted, and associated data information; and if the associated process station and the associated data information are not updated, issuing first update prompt information.
Inventors:
ZHU DAOFENG (CN)
SU SHENG-HUA (CN)
HSIEH MING-HUNG (CN)
SU SHENG-HUA (CN)
HSIEH MING-HUNG (CN)
Application Number:
PCT/CN2021/138409
Publication Date:
February 09, 2023
Filing Date:
December 15, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G06Q10/00
Foreign References:
| TW200534062A | 2005-10-16 | |||
| CN104011833A | 2014-08-27 | |||
| US20050228523A1 | 2005-10-13 | |||
| US6907308B1 | 2005-06-14 |
Attorney, Agent or Firm:
BOXIN CHINA INTELLECTUAL PROPERTY (CN)
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