Title:
CONVEYOR
Document Type and Number:
WIPO Patent Application WO/2013/176025
Kind Code:
A1
Abstract:
A transfer module (12) configured by coupling a plurality of conveying units (11) in the form of a housing is provided with: a pair of coil arrays (15) comprising a plurality of coils (18) disposed along the direction in which the plurality of conveying units (11) are arranged; a slide box (17) for conveying a wafer (W), the slide box (17) being disposed between the pair of coil arrays (15); and a plurality of adaptors (23) interposed between the coils (18) and the inner wall surfaces of the conveying units (11); wherein the slide box (17) has a plurality of permanent magnets (19) facing the coil arrays (15), a plurality of through-holes (24) are drilled into the conveying units (11) correspondingly with respect to the coils (18), each of the adaptors (23) has a rod-shaped shaft (23c) that is inserted into a through-hole (24), and an O-ring (23e) is provided between an inner surface of the through-holes (24) and a side surface of the shafts (23c).
Inventors:
HIROKI TSUTOMU (JP)
Application Number:
PCT/JP2013/063615
Publication Date:
November 28, 2013
Filing Date:
May 09, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/677; B65G49/07
Foreign References:
| JP2009538540A | 2009-11-05 | |||
| JP2009071180A | 2009-04-02 | |||
| JP2008028179A | 2008-02-07 | |||
| JP2003197709A | 2003-07-11 | |||
| JPH01153638U | 1989-10-23 |
Attorney, Agent or Firm:
BECCHAKU Shigehisa et al. (JP)
Role of another Shigehisa (JP)
Role of another Shigehisa (JP)
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