Title:
COOLING SYSTEM, OPERATION METHOD FOR THE COOLING SYSTEM, AND PLASMA PROCESSING SYSTEM USING THE COOLING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2007/040033
Kind Code:
A1
Abstract:
A cooling system in which a compressor (1), a heat source (2), a heat exchanger
(3), and a buffer tank (4) are connected in that order by piping (5) to form a closed
circuit. In the closed circuit, nitrogen as the refrigerant is circulated without
being in contact with the outside air. The refrigerant is sufficient if only it
is gas (refrigerant) other than air, absorbs heat from the heat source (2) without
being liquefied when circulated in the closed circuit, and discharges the heat
to the outside at the heat exchanger (3).
Inventors:
KISHIMOTO KATSUSHI
Application Number:
PCT/JP2006/318385
Publication Date:
April 12, 2007
Filing Date:
September 15, 2006
Export Citation:
Assignee:
SHARP KK (JP)
KISHIMOTO KATSUSHI
KISHIMOTO KATSUSHI
International Classes:
F25B9/00; H01L21/22
Foreign References:
| JP2001196321A | 2001-07-19 | |||
| JPH031053A | 1991-01-07 | |||
| JP2000274852A | 2000-10-06 | |||
| JPH0927459A | 1997-01-28 | |||
| JPH04147615A | 1992-05-21 | |||
| JPH04242926A | 1992-08-31 | |||
| JPH0992624A | 1997-04-04 |
Attorney, Agent or Firm:
FUKAMI, Hisao et al. (Nakanoshima Central Tower 22nd Floor, 2-7, Nakanoshima 2-chome, Kita-k, Osaka-shi Osaka 05, JP)
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