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Title:
COUPLING DEVICE FOR COUPLING ROTATING BODY TO ROTATING SHAFT, AND DEVICE FOR ATTACHING AND DETACHING ROTATING BODY
Document Type and Number:
WIPO Patent Application WO/2023/181651
Kind Code:
A1
Abstract:
The present invention relates to a coupling device for coupling a rotating body such as such as a polishing head and dresser to a rotating shaft. The present invention further relates to a device for attaching and detaching the rotating body coupled to the rotating shaft via this coupling device. A coupling device (40) is used to couple a rotating body (7) to a rotating shaft (23). The coupling device (40) comprises: a flange (45) which is attached to the rotating body (7) and has a coupling shaft (45a); and a fastening structure (50) which fastens the rotating body (7) to the rotating shaft (23) via the coupling shaft (45a).

Inventors:
ITO BAN (JP)
TERADA TETSUYA (JP)
Application Number:
PCT/JP2023/003219
Publication Date:
September 28, 2023
Filing Date:
February 01, 2023
Export Citation:
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Assignee:
EBARA CORP (JP)
International Classes:
B24B53/017; B23B31/107; B23B31/11; B23B31/113; B23B31/20; B23Q3/157; B24B37/30; B24B45/00; B24B53/12; F16D1/00; F16D1/04; F16D1/06; F16D1/092; F16D1/093; H01L21/304
Domestic Patent References:
WO2021220753A12021-11-04
Foreign References:
JP2001347451A2001-12-18
JP2014014883A2014-01-30
JP2020069591A2020-05-07
JP2002192409A2002-07-10
CN212287050U2021-01-05
US20150158144A12015-06-11
JPS52152935U1977-11-19
JP2002021870A2002-01-23
JP2022020099A2022-02-01
JP2016121673A2016-07-07
JP2018161939A2018-10-18
JP2004019925A2004-01-22
JPS59110428U1984-07-25
JPS5010216Y11975-03-31
JP2020019115A2020-02-06
JPH0332525U1991-03-29
Attorney, Agent or Firm:
HIROSAWA, Tetsuya et al. (JP)
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