Title:
CR-SI FILM
Document Type and Number:
WIPO Patent Application WO/2022/210428
Kind Code:
A1
Abstract:
A Cr-Si film, according to the present invention, includes chromium (Cr) and silicon (Si). The compositional range of the Cr-Si film is Cr/(Cr+Si)=0.25-0.75, and the TCR absolute value, in increments of 10℃ in a temperature range of 40℃-150℃, is from 0 ppm/℃ to 100 ppm/℃ inclusive.
Inventors:
HARA HIROYUKI (JP)
MESUDA MASAMI (JP)
MASUDA AYAKA (JP)
MESUDA MASAMI (JP)
MASUDA AYAKA (JP)
Application Number:
PCT/JP2022/014684
Publication Date:
October 06, 2022
Filing Date:
March 25, 2022
Export Citation:
Assignee:
TOSOH CORP (JP)
International Classes:
C23C14/06; C01B33/06
Foreign References:
| JP2010278479A | 2010-12-09 | |||
| JPH07245303A | 1995-09-19 | |||
| US6211032B1 | 2001-04-03 | |||
| CN103590010A | 2014-02-19 | |||
| JP2002367803A | 2002-12-20 | |||
| JP2020203821A | 2020-12-24 | |||
| JP2003176124A | 2003-06-24 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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