Title:
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2011/093022
Kind Code:
A1
Abstract:
Disclosed is a defect inspection device having: a illumination optical system that radiates illumination light to a predetermined region of an inspected object; a detection optical system provided with a detector that can, with a plurality of pixels, detect scattered light from the predetermined region of said inspected object arising from the illumination light from the aforementioned illumination optical system; and a signal processing unit that is provided with a correction unit, which corrects pixel offset—caused by variations in the direction normal to the surface of said inspected object—in a detection signal that is on the basis of the scattered light detected by the detector of the aforementioned detection optical system, and a defect determination unit, which determines defects of the surface of said inspected object on the basis of the detection signal corrected by the aforementioned correction unit.
Inventors:
NAKAO TOSHIYUKI (JP)
MARUYAMA SHIGENOBU (JP)
URANO YUTA (JP)
HONDA TOSHIFUMI (JP)
MARUYAMA SHIGENOBU (JP)
URANO YUTA (JP)
HONDA TOSHIFUMI (JP)
Application Number:
PCT/JP2011/000187
Publication Date:
August 04, 2011
Filing Date:
January 17, 2011
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
NAKAO TOSHIYUKI (JP)
MARUYAMA SHIGENOBU (JP)
URANO YUTA (JP)
HONDA TOSHIFUMI (JP)
NAKAO TOSHIYUKI (JP)
MARUYAMA SHIGENOBU (JP)
URANO YUTA (JP)
HONDA TOSHIFUMI (JP)
International Classes:
G01N21/956; H01L21/66
Foreign References:
| JP2008268140A | 2008-11-06 | |||
| JP2005517906A | 2005-06-16 | |||
| JP2009276273A | 2009-11-26 |
Attorney, Agent or Firm:
INOUE, Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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Claims: