Title:
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/145034
Kind Code:
A1
Abstract:
This defect inspection device (100) is provided with: a vibration exciter that produces elastic waves by excitation; an irradiation unit (2) that projects laser light; a measuring unit (3) that measures interfered laser light; and a control unit that, by varying the frequency of the excitation vibrations that the vibration exciter generates for producing elastic waves by excitation in an object to be inspected (P), acquires vibration state information for a plurality of frequencies, the information concerning the state of the elastic waves produced by excitation in the object to be inspected (P), and on the basis of the acquired vibration state information for the plurality of frequencies, extracts from among the plurality of frequencies a recommended frequency (F) that is recommended for defect inspection in the object to be inspected (P).
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Inventors:
YOSHIDA KOKI (JP)
TAKUBO KENJI (JP)
HATAHORI TAKAHIDE (JP)
TAKUBO KENJI (JP)
HATAHORI TAKAHIDE (JP)
Application Number:
PCT/JP2020/038469
Publication Date:
July 22, 2021
Filing Date:
October 12, 2020
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
G01N21/88; G01N29/12; G01N29/24
Foreign References:
| JP2002055092A | 2002-02-20 | |||
| JP2000088815A | 2000-03-31 | |||
| JPH04323553A | 1992-11-12 | |||
| JP2001280943A | 2001-10-10 | |||
| JP2003207390A | 2003-07-25 | |||
| JP2017219318A | 2017-12-14 | |||
| US20190383774A1 | 2019-12-19 |
Attorney, Agent or Firm:
MIYAZONO, Hirokazu (JP)
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