Title:
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/245810
Kind Code:
A1
Abstract:
Provided is a defect inspection device comprising a plurality of detection optical systems that condense illumination scattered light from the surface of a specimen, a plurality of sensors that convert the illumination scattered light condensed by the corresponding detection optical system into electrical signals and output detection signals, and a signal processing device that processes the detection signals inputted from the plurality of sensors. The signal processing device: generates a first signal group, including an integrated signal obtained by adding together a plurality of detection signals in a predetermined combination, on the basis of one group of detection signals inputted from the plurality of sensors; generates a second signal group by implementing a filtering process on each signal constituting the first signal group; generates a third signal group, including a separation signal obtained by separation from the signals corresponding to the integrated signal according to a predetermined rule, on the basis of the second signal group; and detects or categorizes defects on the basis of the third signal group and stores defect inspection data in a memory.
More Like This:
| JP4744665 | Board inspection equipment and board inspection system |
| JP2008520984 | Inspection equipment |
| JPS63229349 | PATTERN INSPECTION APPARATUS |
Inventors:
HONDA TOSHIFUMI (JP)
KONDO TAKANORI (JP)
OBARA NOBUHIRO (JP)
MAKUUCHI MASAMI (JP)
KONDO TAKANORI (JP)
OBARA NOBUHIRO (JP)
MAKUUCHI MASAMI (JP)
Application Number:
PCT/JP2020/021828
Publication Date:
December 09, 2021
Filing Date:
June 02, 2020
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N21/956
Domestic Patent References:
| WO2019159334A1 | 2019-08-22 |
Foreign References:
| JP2012117898A | 2012-06-21 | |||
| JP3255292B2 | 2002-02-12 | |||
| JP2011179823A | 2011-09-15 | |||
| JP2007240512A | 2007-09-20 | |||
| US20160116419A1 | 2016-04-28 | |||
| US20090073440A1 | 2009-03-19 |
Attorney, Agent or Firm:
KAICHI IP (JP)
Download PDF:
Previous Patent: DISTANCE MEASUREMENT DEVICE, MIRROR CONTROL METHOD, AND PROGRAM
Next Patent: ENVIRONMENT CONTROL SYSTEM
Next Patent: ENVIRONMENT CONTROL SYSTEM