Title:
DISTANCE MEASUREMENT DEVICE, MIRROR CONTROL METHOD, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2021/245809
Kind Code:
A1
Abstract:
This scanning-type distance measurement device comprising a two-dimensional micro electro mechanical system (MEMS) mirror for reflecting laser light comprises: a detection unit for detecting the mirror angle of the two-dimensional MEMS mirror and outputting an angle signal indicating the mirror angle; and a correction circuit for calculating the amplitude and phase of the angle signal, and the amplitude error and phase error relative to the amplitude and phase of a reference angle signal, and correcting, on the basis of the amplitude error and the phase error, the resonance drive waveform of a drive signal for driving the two-dimensional MEMS mirror.
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Inventors:
EJIRI ARATA (JP)
IKAI YOSHIAKI (JP)
YANAI KOSUKE (JP)
IIDA KOICHI (JP)
IKAI YOSHIAKI (JP)
YANAI KOSUKE (JP)
IIDA KOICHI (JP)
Application Number:
PCT/JP2020/021827
Publication Date:
December 09, 2021
Filing Date:
June 02, 2020
Export Citation:
Assignee:
FUJITSU LTD (JP)
International Classes:
G01S7/481; G02B26/10
Domestic Patent References:
| WO2017104613A1 | 2017-06-22 |
Foreign References:
| JP2018063228A | 2018-04-19 | |||
| JP2017203840A | 2017-11-16 | |||
| JP2019086403A | 2019-06-06 | |||
| JP2018132666A | 2018-08-23 | |||
| JP2016024316A | 2016-02-08 | |||
| JP2014020963A | 2014-02-03 | |||
| JP2011118194A | 2011-06-16 | |||
| JP2011112975A | 2011-06-09 | |||
| US20060006337A1 | 2006-01-12 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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