Title:
DEFECT MAPPING METHOD
Document Type and Number:
WIPO Patent Application WO/2021/232606
Kind Code:
A1
Abstract:
A defect mapping method, comprising the following steps: step S1, detecting the version of a mysql database; step S2, using the mysql database having a corresponding version to create a memory table used for storing defect data, wherein the memory table comprises the coordinate information of a position corresponding to the defect data; step S3, creating an index for a field corresponding to the defect data; step S4, storing, into the memory table, the defect data comprising a bright field defect and a dark field defect; step S5, determining a distance between the bright field defect and the dark field defect; and step S6, determining, according to the distance, whether the defects are located at the same position.
Inventors:
PENG QIDONG (CN)
ZHANG MENG (CN)
WANG SIPING (CN)
ZHOU KAI (CN)
PANG FENGJIANG (CN)
WANG SHUANGQIAO (CN)
ZHANG MENG (CN)
WANG SIPING (CN)
ZHOU KAI (CN)
PANG FENGJIANG (CN)
WANG SHUANGQIAO (CN)
Application Number:
PCT/CN2020/111446
Publication Date:
November 25, 2021
Filing Date:
August 26, 2020
Export Citation:
Assignee:
SHENZHEN ZVIT TECH CO LTD (CN)
International Classes:
G06F16/28
Domestic Patent References:
| WO2016207703A1 | 2016-12-29 |
Foreign References:
| CN111339220A | 2020-06-26 | |||
| CN110728659A | 2020-01-24 | |||
| CN109596639A | 2019-04-09 | |||
| CN107590253A | 2018-01-16 | |||
| CN110554047A | 2019-12-10 |
Attorney, Agent or Firm:
SHENZHEN ZHIHUIYUANJIAN INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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