DEFECT REPAIR DEVICE AND DEFECT REPAIR METHOD

WIPO Patent Application WO2006006635

A3

A defect repair device (40) includes a defect inspection unit (45) configured to find a size of a protruding defect on a front surface (23) of a multi-layer film (20) having a rear surface opposite to the front surface, a calculation unit (46) configured to calculate a repair energy so as to repair the protruding defect based on the size of the protruding defect found by the defect inspection unit (45), an energy supplier (41), and an energy controller (46) configured to control the energy supplier (41) to supply the repair energy calculated by the calculation unit to a portion in the multi-layer film (20) from the rear surface of the multi-layer film (20) so as to cause a decrease in a volume of the portion and retract the protruding defect into the multi-layer film (20).

IKUTA YOSHIAKI (US)
UNO TOSHIYUKI (US)

PCT/JP2005/012964

May 26, 2006

July 07, 2005

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ASAHI GLASS CO LTD (JP)
IKUTA YOSHIAKI (US)
UNO TOSHIYUKI (US)

G03F7/20; G21K1/06

WO2002027404A2

2002-04-04

US20030164949A1

2003-09-04

HAU-RIEGE S P, STEARNS D G: "Correction of figure errors on optical surfaces by laser-induced contraction of Mo/Si multilayers", OPTICS LETTERS, vol. 28, no. 6, 15 March 2003 (2003-03-15), pages 456 - 458, XP002367868
STEARNS D G ET AL: "Thermally induced structural modification of Mo-Si multilayers", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 67, no. 5, 1 March 1990 (1990-03-01), pages 2415 - 2427, XP002212713, ISSN: 0021-8979

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