Title:
DEPOSITION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/197068
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a deposition apparatus capable of minimizing the case in which heat for heating a crucible reaches a substrate, and also capable of effectively alleviating clogging. The deposition apparatus comprises: a crucible; a heater part arranged outside the crucible so as to heat the crucible; a plurality of nozzles for supplying a deposition material, having evaporated from a deposition material, to a product on which deposition is carried out; and a cooling part arranged outside the heater part, and can further comprise at least one from among a shielding part, a thermoelectric module and a nozzle block.
Inventors:
MOON BYOUNGJUN (KR)
KIM SUNKEE (KR)
CHOI KUNHOON (KR)
CHO YOUNGSOO (KR)
KIM SUNKEE (KR)
CHOI KUNHOON (KR)
CHO YOUNGSOO (KR)
Application Number:
PCT/KR2020/000992
Publication Date:
October 01, 2020
Filing Date:
January 21, 2020
Export Citation:
Assignee:
LG ELECTRONICS INC (KR)
International Classes:
C23C14/24; C23C14/56
Foreign References:
| KR20190006707A | 2019-01-21 | |||
| KR20170123244A | 2017-11-07 | |||
| KR20180066738A | 2018-06-19 | |||
| KR960003245B1 | 1996-03-07 | |||
| JPH06108236A | 1994-04-19 |
Attorney, Agent or Firm:
HAW, Yong Noke (KR)
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