Title:
DEVICE FOR MEASURING REFLECTANCE AND INCIDENT LIGHT QUANTITY
Document Type and Number:
WIPO Patent Application WO/2021/246602
Kind Code:
A1
Abstract:
The present invention relates to a device for measuring reflectance and incident light quantity. Specifically, according to one embodiment of the present invention, the device comprises: a light source; a light splitter for splitting the light source into a first beam directed toward a sample and a second beam separated from the first beam; a phase retarder for retarding the phase of the second beam split by the light splitter; a light detector for detecting the reflected beam formed from the first beam being reflected on the sample, and the second beam having passed through the phase retarder; a first polarizer disposed between the light source and the phase retarder; a second polarizer disposed between the phase retarder and the light detector; and a signal processing unit for obtaining a signal by separating, into a low-frequency signal and a high-frequency signal, a signal detected by the photodetector, and obtaining the reflectivity of the sample and an incident light quantity from the low-frequency signal and the high-frequency signal.
Inventors:
PAHK HEUI JAE (KR)
LEE SIN YONG (KR)
LEE SIN YONG (KR)
Application Number:
PCT/KR2020/019480
Publication Date:
December 09, 2021
Filing Date:
December 31, 2020
Export Citation:
Assignee:
SEOUL NAT UNIV R&DB FOUNDATION (KR)
International Classes:
G01N21/552; G01J1/04; G01J9/02; G01N21/55
Foreign References:
| JP2014035257A | 2014-02-24 | |||
| KR20140133992A | 2014-11-21 | |||
| JP2006250849A | 2006-09-21 | |||
| JP2012073152A | 2012-04-12 | |||
| JP2012202860A | 2012-10-22 |
Attorney, Agent or Firm:
Y.P.LEE, MOCK & PARTNERS (KR)
Download PDF: