Title:
DICING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/189716
Kind Code:
A1
Abstract:
Provided is a dicing device that can perform a maintenance task well even when a workpiece is large. This dicing device (10) comprises a housing (52) which accommodates in the interior thereof a work table (12) that holds and moves a workpiece (W) and a spindle (18) that can rotate while holding a blade (14), wherein: the housing (52) has an end surface, which is provided in the movement direction of the work table (12) and which serves as the side of the dicing device (10) that performs the maintenance task, and comprises a slider (54) which constitutes part of the end surface; and the slider (54) is configured to be freely slidable in the direction in which the distance from the end surface to the spindle (18) lessens.
Inventors:
KANESHIRO YUSUKE (JP)
Application Number:
PCT/JP2023/010554
Publication Date:
October 05, 2023
Filing Date:
March 17, 2023
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD (JP)
International Classes:
B24B27/06; B24B41/06; B24B55/06; H01L21/301
Foreign References:
| JP2012222232A | 2012-11-12 | |||
| JP2013254834A | 2013-12-19 | |||
| JP2010272842A | 2010-12-02 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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