Title:
DISCHARGE DEVICE, DISCHARGE METHOD, ARTICLE MANUFACTURING DEVICE, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2019/123993
Kind Code:
A1
Abstract:
Provided is a discharge device that is capable of appropriately discharging a fluid from all nozzles. This discharge device is provided with: a discharge means that has a plurality of nozzles for discharging a liquid fluid; and a control means for controlling discharging of the fluid from the nozzles by applying driving signals to discharge-energy generation elements included in the nozzles. The control means has, for each of the nozzles, an adjustment table for adjusting the driving signals and performs discharge adjustment for each of the nozzles on the basis of the discharge results of the nozzles acquired by an acquisition means and the adjustment table.
Inventors:
KATSUTA KEN (JP)
NAMBA HISASHI (JP)
HASEGAWA NORIYASU (JP)
NAMBA HISASHI (JP)
HASEGAWA NORIYASU (JP)
Application Number:
PCT/JP2018/043561
Publication Date:
June 27, 2019
Filing Date:
November 27, 2018
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
B41J2/14; B29C59/02; B41J2/01; B41J2/015; H01L21/027
Foreign References:
| JP2013065624A | 2013-04-11 | |||
| JP2012045780A | 2012-03-08 | |||
| JP2017209983A | 2017-11-30 | |||
| JP2016112554A | 2016-06-23 | |||
| US20140210889A1 | 2014-07-31 |
Attorney, Agent or Firm:
TANI & ABE, P.C. (JP)
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