Title:
DISCHARGE LAMP
Document Type and Number:
WIPO Patent Application WO/2012/133616
Kind Code:
A1
Abstract:
An exposure apparatus of the present invention is provided with: a discharge lamp, which radiates light that includes emission lines, i.e., the g line (436 nm), the h line (405 nm) and the i line (365 nm); a light measuring means, which has a light receiving section, and measures the light radiated from the discharge lamp; and an illumination adjusting means, which, on the basis of a measurement value obtained from the light measuring means, adjusts power to be supplied to the discharge lamp. The light measuring means has spectral sensitivity characteristics having peak sensitivities between two adjacent emission lines among the g line, the h line and the i line.
Inventors:
FUJIMORI AKIYOSHI (JP)
KANAI NOBUO (JP)
FUJIHARA KAZUMASA (JP)
KAMIJO KEI (JP)
NAGUMO YOSUKE (JP)
KANAI NOBUO (JP)
FUJIHARA KAZUMASA (JP)
KAMIJO KEI (JP)
NAGUMO YOSUKE (JP)
Application Number:
PCT/JP2012/058304
Publication Date:
October 04, 2012
Filing Date:
March 29, 2012
Export Citation:
Assignee:
ORC MFG CO LTD (JP)
FUJIMORI AKIYOSHI (JP)
KANAI NOBUO (JP)
FUJIHARA KAZUMASA (JP)
KAMIJO KEI (JP)
NAGUMO YOSUKE (JP)
FUJIMORI AKIYOSHI (JP)
KANAI NOBUO (JP)
FUJIHARA KAZUMASA (JP)
KAMIJO KEI (JP)
NAGUMO YOSUKE (JP)
International Classes:
G03F7/20; G01J1/02; H01L21/027
Foreign References:
| JP2009251551A | 2009-10-29 | |||
| JP2009021971A | 2009-01-29 | |||
| JPH0521176A | 1993-01-29 | |||
| JPH036011A | 1991-01-11 | |||
| JPS62137527A | 1987-06-20 |
Attorney, Agent or Firm:
MATSUURA TAKASHI (JP)
Takashi Matsuura (JP)
Takashi Matsuura (JP)
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Claims: