Title:
DRIVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/171687
Kind Code:
A1
Abstract:
A mobile-side magnet 4 is provided to a mobile part 2 inside a vacuum chamber 1. A drive part 5 is provided to the outside of the vacuum chamber 1, and drives the mobile part 2 by exerting a magnetic force on the mobile-side magnet 4. The drive part 5 comprises a first magnet 8, a second magnet 9 and a movement mechanism (movement member 7). The first magnet 8 exerts a magnetic force that attracts the mobile-side magnet 4. The second magnet 9 is provided adjacent to the first magnet 8, and exerts a magnetic force that repels the mobile-side magnet 4. The movement mechanism moves the first magnet 8 and the second magnet 9 integrally.
Inventors:
FURUTA MASAJI (JP)
KODERA KEI (JP)
WATANABE KIYOSHI (JP)
KODERA KEI (JP)
WATANABE KIYOSHI (JP)
Application Number:
PCT/JP2018/044579
Publication Date:
September 12, 2019
Filing Date:
December 04, 2018
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
F16H21/10; F16H49/00; G01N27/62
Foreign References:
| JPH0489717A | 1992-03-23 | |||
| JP2008265363A | 2008-11-06 | |||
| JP2009161009A | 2009-07-23 |
Attorney, Agent or Firm:
YOSHIMOTO, Tsutomu et al. (JP)
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