DRY TEXTURING APPARATUS FOR ALKALI SDR SURFACE OF CRYSTALLINE SOLAR CELL, USING ATMOSPHERIC PLASMA

WIPO Patent Application WO/2020/149463

A1

The present invention relates to a dry texturing apparatus for a crystalline solar cell and, particularly, to a dry texturing apparatus for an alkali SDR surface of a crystalline solar cell, using atmospheric plasma, the apparatus being easily coupled to wet equipment while even enabling the removal of a wet texturing process, being advantageous in the precise control of ion transfer, and having a reduced frontal reflectance, thereby improving photoelectric conversion efficiency. To this end, the present invention provides a dry texturing apparatus comprising an atmospheric plasma generation module, which comprises: a first dielectric having a metal electrode printed thereon; a second dielectric bonded to the first dielectric, and having a power line connection part so that a power line is connected to the metal electrode; and a ground housing, which covers the first dielectric and the second dielectric, has, on the upper part thereof, a gas supply port to which a gas line is connected, and has several gas discharge holes arranged at the lower part thereof at intervals in a supply direction of a wafer and in an orthogonal direction.

HYEON DEOK HWAN (KR)
YANG CHANG SIL (KR)

PCT/KR2019/006839

July 23, 2020

June 06, 2019

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Y I TECH CO LTD (KR)

H01L31/0236; H01L21/311; H01L21/67; H01L31/036; H01L31/18

KR100785463B1	2007-12-14
JPH09213497A	1997-08-15
KR100530821B1	2005-11-28
KR101393466B1	2014-05-12
KR20050103251A	2005-10-27

JANG, Sang Gi (KR)

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