Title:
ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2023/002822
Kind Code:
A1
Abstract:
Provided is an elastic wave device in which cracks are unlikely to occur in a piezoelectric layer. An elastic wave device 10 according to the present invention comprises a support member including a support substrate, a piezoelectric layer 14 provided on the support member, and a functional electrode (IDT electrode 11) provided on the piezoelectric layer 14 and including at least one pair of electrodes. The support member is provided with a cavity portion. The cavity portion overlaps at least a part of the functional electrode in plan view. The piezoelectric layer 14 includes a membrane portion 14c overlapping with the cavity portion in plan view, and a supported portion 14d supported by the support member. A boundary covering electrode is provided on the piezoelectric layer 14, across an entire portion which overlaps a boundary E between the membrane portion 14c and the supported portion 14d, in plan view.
Inventors:
INOUE KAZUNORI (JP)
YAMANE TAKASHI (JP)
YAMANE TAKASHI (JP)
Application Number:
PCT/JP2022/025939
Publication Date:
January 26, 2023
Filing Date:
June 29, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2021060513A1 | 2021-04-01 |
Foreign References:
| CN112787614A | 2021-05-11 | |||
| JP2012257019A | 2012-12-27 | |||
| US20190386633A1 | 2019-12-19 | |||
| US9013088B1 | 2015-04-21 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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