Title:
ELASTIC WAVE DEVICE AND PRODUCTION METHOD FOR ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/195409
Kind Code:
A1
Abstract:
An elastic wave device according to the present invention comprises a support substrate that has a cavity in one principal surface, a piezoelectric layer that is provided on the one principal surface of the support substrate, and a functional electrode that is provided on the piezoelectric layer. The cavity is at a position that coincides with a portion of the functional electrode as seen in plan view along the layering direction of the support substrate and the piezoelectric layer, and an opposing part that forms the cavity in the support substrate and is opposite the functional electrode as seen in plan view along the layering direction is formed from a plurality of dielectric films that have different dielectric constants.
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Inventors:
INOUE KAZUNORI (JP)
OUCHI MINEFUMI (JP)
OUCHI MINEFUMI (JP)
Application Number:
PCT/JP2023/013141
Publication Date:
October 12, 2023
Filing Date:
March 30, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25; H03H3/08; H03H9/145
Domestic Patent References:
| WO2016098526A1 | 2016-06-23 | |||
| WO2021200835A1 | 2021-10-07 | |||
| WO2016147687A1 | 2016-09-22 |
Foreign References:
| JP6984800B1 | 2021-12-22 | |||
| US20210119595A1 | 2021-04-22 |
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
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