Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/158363
Kind Code:
A1
Abstract:
Provided is an elastic wave device capable of suppressing a lateral mode while increasing the freedom of material. An elastic wave device 1 of the present invention is provided with: a piezoelectric substrate 2 including a piezoelectric body layer 6; an IDT electrode 8 provided on the piezoelectric substrate 2 and having a plurality of electrode fingers; and a dielectric film 7 provided between the piezoelectric substrate 2 and the IDT electrode 8. In the IDT electrode 8, a region in which adjacent electrode fingers overlap when viewed from an elastic wave propagation direction is an intersecting region A. When the direction of extension of the plurality of electrode fingers is defined as an electrode finger extending direction, the intersecting region A includes a central region C, and a first region E1 and a second region E2 sandwiching the central region C in the electrode finger extending direction. The dielectric constant and density of the dielectric film 7 are lower than the dielectric constant and density of the piezoelectric body layer 6. The dielectric film 7 is provided in a portion overlapping the central region C, and is not provided in portions overlapping the first region E1 and the second region E2 in plan view.
Inventors:
DAIMON KATSUYA (JP)
Application Number:
PCT/JP2022/000840
Publication Date:
July 28, 2022
Filing Date:
January 13, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25; H03H9/145
Domestic Patent References:
| WO2019138813A1 | 2019-07-18 |
Foreign References:
| JP2012186808A | 2012-09-27 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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