Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/211087
Kind Code:
A1
Abstract:
An elastic wave device according to the present disclosure is provided with: a support member including a support substrate having a thickness direction; a piezoelectric layer provided on the support member; and an IDT electrode provided on the piezoelectric layer. In the support member, a cavity is provided at a position that overlaps at least a portion of the IDT electrode in plan view along the thickness direction. A through-hole reaching the cavity is provided in the piezoelectric layer. The IDT electrode has: a first busbar; a second busbar opposed to the first busbar; a plurality of first electrode fingers that are provided on the first busbar and that extend towards the second busbar; and a plurality of second electrode fingers that are provided on the second busbar and that extend towards the first busbar. The plurality of first electrode fingers and the plurality of second electrode fingers are arranged so as to overlap each other when viewed in an opposed direction in which the plurality of first electrode fingers and the plurality of second electrode fingers that are adjacent to each other are opposed to each other. In plan view along the thickness direction, the through-hole is provided at a position excluding a region between a first imaginary line passing through the leading ends of the plurality of first electrode fingers and a second imaginary line passing through the leading ends of the plurality of second electrode fingers.
Inventors:
KIMURA TETSUYA (JP)
SUZUKI KATSUMI (JP)
INOUE KAZUNORI (JP)
SUZUKI KATSUMI (JP)
INOUE KAZUNORI (JP)
Application Number:
PCT/JP2022/016845
Publication Date:
October 06, 2022
Filing Date:
March 31, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2016098526A1 | 2016-06-23 |
Foreign References:
| JP2014013991A | 2014-01-23 | |||
| JP2016086308A | 2016-05-19 | |||
| JP2010147875A | 2010-07-01 | |||
| JP2012257019A | 2012-12-27 | |||
| JP2010233210A | 2010-10-14 | |||
| JP2013528996A | 2013-07-11 |
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
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