Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/003006
Kind Code:
A1
Abstract:
The present invention provides an elastic wave device in which temperature characteristics can be improved. An elastic wave device 1 comprises a piezoelectric layer 3, and an IDT electrode 4 which is provided on the piezoelectric layer 3 and which has a plurality of electrode fingers (the plurality of first and second electrode fingers 8, 9) arranged in a periodic manner. The electrode fingers include at least one electrode layer, the at least one electrode layer including at least one of Nb, Pd, and Ni. The total thickness of the electrode layer calculated assuming the electrode layer comprises Mo on the basis of the density ratio of the electrode layer and Mo is at least 10% with respect to the period of the plurality of electrode fingers.
Inventors:
NAGATOMO SHO (JP)
Application Number:
PCT/JP2022/028145
Publication Date:
January 26, 2023
Filing Date:
July 20, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2016047255A1 | 2016-03-31 | |||
| WO2006114930A1 | 2006-11-02 |
Foreign References:
| JP2020156003A | 2020-09-24 | |||
| JP2012222458A | 2012-11-12 | |||
| US20200169247A1 | 2020-05-28 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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