Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/003005
Kind Code:
A1
Abstract:
Provided is an elastic wave device which can decrease the absolute value of a difference ΔTCV between sound velocity temperature coefficients at a resonance point and an anti-resonance point. This elastic device 1 comprises: a piezoelectric substrate 2 including an acoustic reflective layer (acoustic reflective film 24), and a piezoelectric layer 6 provided on the acoustic reflective layer; and an IDT electrode 7 provided on the piezoelectric substrate 2 and having a plurality of electrode fingers (a plurality of first and second electrode fingers 18, 19). When the wavelength defined by the electrode finger pitch of the IDT electrode 7 is λ, the thickness of the piezoelectric layer 6 is 3 λ or less. The electrode fingers include at least one electrode layer. The sum of the thickness of the electrode layer converted with the electrode layer being made of Al on the basis of the density ratio of the electrode layer and Al is at least the thickness of the piezoelectric layer 6.
Inventors:
NAGATOMO SHO (JP)
Application Number:
PCT/JP2022/028144
Publication Date:
January 26, 2023
Filing Date:
July 20, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2018123208A1 | 2018-07-05 | |||
| WO2017159408A1 | 2017-09-21 |
Foreign References:
| JP2020109957A | 2020-07-16 | |||
| JP2007031832A | 2007-02-08 | |||
| US20170288636A1 | 2017-10-05 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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