Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/074463
Kind Code:
A1
Abstract:
Provided is an elastic wave device that not only affords improved linearity but also enables miniaturization. An elastic wave device 1 has a piezoelectric film 4 directly or indirectly layered on a support substrate 2 and comprises: a first IDT electrode 5 provided to a first main surface 4a of the piezoelectric film 4; and a second IDT electrode 15 provided to a second main surface 4b. One of the first IDT electrode 5 and the second IDT electrode 15 is formed of an epitaxial film, while the other of the first IDT electrode 5 and the second IDT electrode 15 is formed of a non-epitaxial film.
Inventors:
KYOUYA HARUKI (JP)
Application Number:
PCT/JP2022/038718
Publication Date:
May 04, 2023
Filing Date:
October 18, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145
Domestic Patent References:
| WO2007007462A1 | 2007-01-18 | |||
| WO2009150786A1 | 2009-12-17 |
Foreign References:
| JP2018195936A | 2018-12-06 | |||
| JP2007288764A | 2007-11-01 | |||
| JP2018011280A | 2018-01-18 | |||
| JP2018506930A | 2018-03-08 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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