Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/234321
Kind Code:
A1
Abstract:
The present invention reduces fluctuations in frequency characteristics. The present invention comprises: a piezoelectric layer having a first main surface and a second main surface that face each other in a first direction; at least one pair of electrodes that are disposed on the first main surface and/or the second main surface; and a protection film that covers at least a portion of the pair of electrodes. The protection film includes: an insulation film of a first component contacting the pair of electrodes; and an insulation film of a second component forming a surface layer. The insulation film of the first component has greater moisture resistance than the insulation film of the second component. The insulation film of the second component has greater plasma resistance than the insulation film of the first component.
Inventors:
YAMAJI TORU (JP)
YAMAZAKI SUNAO (JP)
SUZUKI HIROYA (JP)
YAMAZAKI SUNAO (JP)
SUZUKI HIROYA (JP)
Application Number:
PCT/JP2023/020181
Publication Date:
December 07, 2023
Filing Date:
May 30, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2015022931A1 | 2015-02-19 | |||
| WO2018198654A1 | 2018-11-01 | |||
| WO2022102719A1 | 2022-05-19 | |||
| WO2002082645A1 | 2002-10-17 |
Foreign References:
| JP2005150787A | 2005-06-09 | |||
| JP2011244065A | 2011-12-01 | |||
| JP2018085651A | 2018-05-31 | |||
| JP2019216422A | 2019-12-19 | |||
| JP2018157564A | 2018-10-04 | |||
| JP2019527834A | 2019-10-03 | |||
| JP2005142629A | 2005-06-02 | |||
| US20210028762A1 | 2021-01-28 | |||
| JP2000209063A | 2000-07-28 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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